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公开(公告)号：EP4060714A1
公开(公告)日：2022-09-21
申请号：EP21163522.2
申请日：2021-03-18
摘要： Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body (503) arranged along the beam path; a lens arrangement (504, 505) arranged in a down-beam part of the flood column; and a lens support (502, 507) arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.
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公开(公告)号：EP3971938A1
公开(公告)日：2022-03-23
申请号：EP20197510.9
申请日：2020-09-22
发明人： OTTEN, Christiaan , CRANS, Peter-Paul , SMITS, Marc , DEL TIN, Laura , TEUNISSEN, Christan , HUANG, Yang-Shan , STEENBRINK, Stijn, Wilem, Herman, Karel , HU, Xuerang , XI, Qingpo , LUO, Xinan , LIU, Xuedong
摘要： Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus.
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公开(公告)号：EP4290550A1
公开(公告)日：2023-12-13
申请号：EP22178490.3
申请日：2022-06-10
摘要： A charged particle-optical device for projecting a plurality of charged particle beams along respective beam paths towards a sample location, the charged particle-optical device comprising: a charged particle-optical assembly configured to manipulate the charged particle beams, the charged particle-optical assembly comprising a first charged particle-optical element comprising a plate having one or more apertures around a beam path of the charged particle beams; and an electrical connector configured to electrically connect the plate of the first charged particle-optical element to an electrical power source, wherein the electrical connector: comprises a shield configured to define a field free region substantially free of electric fields; and is configured to be electrically connectable to a flexible coupling configured to electrically connect the plate of the first charged particle-optical element to the electrical power source, the flexible coupling located within the field free region.
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公开(公告)号：EP4165675A1
公开(公告)日：2023-04-19
申请号：EP21729576.5
申请日：2021-06-03
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