- 专利标题: ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE FILM, PATTERN FORMING METHOD, AND METHOD FOR PRODUCING ELECTRONIC DEVICE
-
申请号: EP20872132.4申请日: 2020-09-14
-
公开(公告)号: EP4039669A1公开(公告)日: 2022-08-10
- 发明人: MIYOSHI, Taro , YONEKUTA, Yasunori , FUKUZAKI, Eiji , TAKAHASHI, Toshiya
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo 106-8620 26-30, Nishiazabu 2-chome Minato-ku
- 代理机构: HGF
- 优先权: JP2020094650 20200529
- 国际公布: WO2021065450 20210408
- 主分类号: C07C25/02
- IPC分类号: C07C25/02 ; C07C43/225 ; C07C309/12 ; C07C309/22 ; C07C309/42 ; C07C309/58 ; C07C381/12 ; C08F12/24 ; C08F20/16 ; C08F20/58 ; C09K3/00 ; G03F7/004 ; G03F7/039 ; G03F7/20
摘要:
An active light sensitive or radiation sensitive resin composition which contains (A) an acid-decomposable resin, (B) a compound represented by general formula (bl), and (C) a compound represented by general formula (c1), wherein the ratio of the content of the compound (C) to the content of the compound (B) is from 0.01% by mass to 10% by mass; an active light sensitive or radiation sensitive film which uses this active light sensitive or radiation sensitive resin composition; a pattern forming method; and a method for producing an electronic device. In the formulae, L1 represents a single bond or a divalent linking group; A represents a group that is decomposed by the action of an acid; each B represents a group that is decomposed by the action of an acid, a hydroxy group or a carboxy group, provided that at least one B represents a hydroxy group or a carboxy group; n represents an integer from 1 or 5; X represents an (n+1)-valent linking group; and M + represents a sulfonium ion or an iodonium ion.
信息查询