- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
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申请号: EP23151392.0申请日: 2020-05-14
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公开(公告)号: EP4202931A1公开(公告)日: 2023-06-28
- 发明人: WANG, Hui-Lin , HSU, Po-Kai , WENG, Chen-Yi , JHANG, Jing-Yin , WANG, Yu-Ping , CHEN, Hung-Yueh
- 申请人: United Microelectronics Corp.
- 申请人地址: TW Hsin-Chu City 300 No. 3, Lin-Hsin Rd. 2 Science-Based Industrial Park
- 代理机构: Isarpatent
- 优先权: CN201910841032 20190906
- 主分类号: G11C11/16
- IPC分类号: G11C11/16 ; H10B61/00 ; H10N50/01 ; H10N50/10 ; H10N35/00 ; H10N35/01 ; H10N39/00
摘要:
A method for fabricating semiconductor device includes the steps of: forming a substrate having a magnetic tunneling junction (MTJ) region and a logic region; forming a MTJ on the MTJ region; forming a top electrode on the MTJ; forming an inter-metal dielectric (IMD) layer around the MTJ; removing the IMD layer directly on the top electrode to form a recess; forming a first hard mask on the IMD layer and into the recess; removing the first hard mask and the IMD layer on the logic region to form a contact hole; and forming a metal layer in the recess and the contact hole to form a connecting structure on the top electrode and a metal interconnection on the logic region.
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