本发明公开的目的是提供相对较大的薄的单晶衬底能够容易地制造单晶衬底的制造方法。 的单晶衬底的制造方法包括将所述激光聚焦装置中的单晶部分10的非接触的步骤，一个激光聚焦单元，单晶照射激光束B向构件的单晶表面 而聚光的激光束B向内侧部件，所述激光聚焦装置会聚激光入射的外周部在所述内周部的激光聚焦装置侧从入射光到激光聚焦装置同时收集光 通过相对地移动所述光学装置和所述单晶部件10，单晶部件的内部，形成了两维薄Atsuaratame电解质层，形成了单晶层由细Atsuaratame电解质层分离 并且通过从与薄Atsuaratame电解质层的界面剥离形成的单晶衬底的工序。 .The

The present invention aims to provide a relatively large and a thin single crystal substrate can be easily manufactured single-crystal substrate manufacturing method.
A single crystal substrate manufacturing method includes the steps of disposing the laser focusing means in a non-contact on the single crystal part 10, the laser focusing means, the single crystal is irradiated with a laser beam B to the single crystal component surface with focusing the laser light B to the inner member, the laser focusing means the laser beam focusing the light incident on the outer periphery of the inner peripheral part laser focusing means side of the incident light into the laser focusing means while collecting light of by relatively moving the optical means and the single crystal part 10, inside the single crystal member, forming a two-dimensional thin Atsuaratame the electrolyte layer, a single crystal layer formed is divided by thin Atsuaratame electrolyte layer and a step of forming a single crystal substrate by peeling from the interface with the thin Atsuaratame electrolyte layer.
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