Invention Grant
- Patent Title: Methods of forming IC products comprising a nano-sheet device and a transistor device having first and second replacement gate structures
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Application No.: US15219403Application Date: 2016-07-26
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Publication No.: US10014389B2Publication Date: 2018-07-03
- Inventor: Ruilong Xie , Chanro Park , Min Gyu Sung , Hoon Kim
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/06 ; H01L29/165 ; H01L21/02 ; H01L21/308

Abstract:
One illustrative method disclosed herein includes, among other things, forming channel semiconductor material for a nano-sheet device and a transistor device, forming a device gate insulation layer on both the nano-sheet device and on the transistor device, and forming first and second sacrificial gate structures for the nano-sheet device and the transistor device. In this example, the method also includes removing the sacrificial gate structures so as to define, respectively, first and second gate cavities, wherein the device gate insulation layer is exposed within each of the gate cavities, removing the device gate insulation layer for the transistor device from within the first gate cavity while leaving the device gate insulation layer in position within the second gate cavity, and forming first and second replacement gate structures in the first and second gate cavities, respectively.
Public/Granted literature
- US20180033871A1 METHODS OF FORMING IC PRODUCTS COMPRISING A NANO-SHEET DEVICE AND A TRANSISTOR DEVICE Public/Granted day:2018-02-01
Information query
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