Invention Grant
- Patent Title: Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method
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Application No.: US14721090Application Date: 2015-05-26
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Publication No.: US10020172B2Publication Date: 2018-07-10
- Inventor: Mitsunori Ohata , Hidetoshi Kimura , Kiyoshi Maeda , Jun Hirose , Tsuyoshi Hida
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2010-206020 20100914
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67 ; H01L21/687 ; C23C16/52

Abstract:
There is provided a plasma processing apparatus including a susceptor, having a substrate mounting portion for mounting thereon a substrate; a focus ring including an outer ring and an inner ring; a dielectric ring; a dielectric constant varying device for varying a dielectric constant of the dielectric ring; a grounding body positioned at an outside of the dielectric ring with a gap from a bottom surface of the focus ring; and a controller for controlling a top surface electric potential of the focus ring by controlling a current flowing from the susceptor to the substrate.
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