Copper etching integration scheme
Abstract:
The present disclosure relates to a method for forming an interconnect structure. In some embodiments, the method may be performed by forming an opening within a sacrificial layer. The sacrificial layer is over a substrate. A conductive material is formed within the opening and over the sacrificial layer. The conductive material within the opening defines a conductive body. The conductive material is patterned to define a conductive projection extending outward from the conductive body. The sacrificial layer is removed and a dielectric material is formed surrounding the conductive body and the conductive projection.
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