Invention Grant
- Patent Title: Method of manufacturing electron multiplier body, photomultiplier tube, and photomultiplier
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Application No.: US15858600Application Date: 2017-12-29
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Publication No.: US10037871B2Publication Date: 2018-07-31
- Inventor: Motohiro Suyama , Hiroshi Kobayashi , Shinya Hattori
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2015-041555 20150303
- Main IPC: H01J43/10
- IPC: H01J43/10 ; B32B3/00 ; B32B9/00 ; B32B9/04 ; H01J9/12 ; H01J43/16 ; H01J43/24 ; C23C14/00

Abstract:
A method of manufacturing an electron multiplier body, the method includes a step of preparing a first plate-like member having a surface and a back surface and a pair of second plate-like members, a step of forming, in the first plate-like member, a hole portion reaching from the front surface to the back surface, a step of constituting a laminated body by laminating the first and second plate-like members on each other so that the first plate-like member is interposed between the pair of second plate-like members to form a channel defined by the hole portion in the laminated body, a step of integrating the laminated body, a step of constituting a main body portion by cutting the integrated laminated body so that the channel is open, and a step of forming a resistive layer and a secondary electron multiplication layer on an inner surface of the channel.
Public/Granted literature
- US20180144914A1 METHOD OF MANUFACTURING ELECTRON MULTIPLIER BODY, PHOTOMULTIPLIER TUBE, AND PHOTOMULTIPLIER Public/Granted day:2018-05-24
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