- 专利标题: MRAM device and method for fabricating the same
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申请号: US15281428申请日: 2016-09-30
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公开(公告)号: US10038137B2公开(公告)日: 2018-07-31
- 发明人: Harry-Hak-Lay Chuang , Sheng-Haung Huang , Hung-Cho Wang , Kuei-Hung Shen , Shy-Jay Lin
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 主分类号: H01L27/22
- IPC分类号: H01L27/22 ; H01L43/12 ; H01L43/08 ; H01L43/02
摘要:
A semiconductor device structure is provided. The semiconductor device structure includes a magnetoresistive random access memory (MRAM) device in an insulating layer. The MRAM device includes a first electrode, a magnetic tunnel junction (MTJ) over the first electrode, a second electrode over the MTJ, and an insulating spacer surrounding sidewalls of the first electrode, the MTJ, and the second electrode. Top surfaces of the insulating spacer and the second electrode are exposed from the insulating layer. The semiconductor device structure also includes a conductive pad over the insulating layer and electrically connected to the second electrode. The MTJ is entirely covered by the conductive pad.
公开/授权文献
- US20180097175A1 MRAM DEVICE AND METHOD FOR FABRICATING THE SAME 公开/授权日:2018-04-05
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