Invention Grant
- Patent Title: Semiconductor devices
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Application No.: US15723729Application Date: 2017-10-03
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Publication No.: US10043889B2Publication Date: 2018-08-07
- Inventor: GeumJung Seong , JinWook Lee , Dohyoung Kim , Sungwoo Myung , Jisoo Oh , Yong-Ho Jeon
- Applicant: GeumJung Seong , JinWook Lee , Dohyoung Kim , Sungwoo Myung , Jisoo Oh , Yong-Ho Jeon
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Ward and Smith, P.A.
- Priority: KR10-2015-0021639 20150212
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/66 ; H01L21/3213 ; H01L21/311 ; H01L29/49 ; H01L29/40 ; H01L21/3105

Abstract:
The inventive concept relates to a semiconductor device and a method for fabricating the same. The semiconductor device comprises active patterns protruding from a substrate, an interlayer dielectric layer disposed on the substrate and including grooves exposing the active patterns, and gate electrodes in the grooves. The grooves include a first groove having a first width and a second groove having a second width greater than the first width. The gate electrodes include a first gate electrode in the first groove, and a second gate electrode in the second groove. Each of the first and second gate electrodes includes a first work function conductive pattern on a bottom surface and sidewalls of corresponding one of the first and second grooves, and a second work function conductive pattern on the first work function conductive pattern.
Public/Granted literature
- US20180033867A1 Semiconductor Devices Public/Granted day:2018-02-01
Information query
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