Invention Grant
- Patent Title: Wafer handler and methods of manufacture
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Application No.: US15432560Application Date: 2017-02-14
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Publication No.: US10049909B2Publication Date: 2018-08-14
- Inventor: John J. Garant , Jonathan H. Griffith , Brittany L. Hedrick , Edmund J. Sprogis
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B32B37/24 ; B32B38/10 ; B81C1/00

Abstract:
A wafer handler with a removable bow compensating layer and methods of manufacture is disclosed. The method includes forming at least one layer of stressed material on a front side of a wafer handler. The method further includes forming another stressed material on a backside of the wafer handler which counter balances the at least one layer of stressed material on the front side of the wafer handler, thereby decreasing an overall bow of the wafer handler.
Public/Granted literature
- US20170154800A1 WAFER HANDLER AND METHODS OF MANUFACTURE Public/Granted day:2017-06-01
Information query
IPC分类: