Invention Grant
- Patent Title: Integrated photodetector waveguide structure with alignment tolerance
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Application No.: US15155462Application Date: 2016-05-16
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Publication No.: US10090422B2Publication Date: 2018-10-02
- Inventor: Solomon Assefa , Bruce W. Porth , Steven M. Shank
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Steven Meyers; Andrew M. Calderon
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/0232 ; H01L31/028 ; G02B6/122 ; G02B6/136 ; G02B6/42 ; H01L31/0203 ; H01L31/09 ; G06F17/50 ; H01L29/06 ; H01L31/0304 ; G02B6/12
Abstract:
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
Public/Granted literature
- US20160260849A1 INTEGRATED PHOTODETECTOR WAVEGUIDE STRUCTURE WITH ALIGNMENT TOLERANCE Public/Granted day:2016-09-08
Information query
IPC分类:
