- 专利标题: Multi-axis integrated MEMS inertial sensing device on single packaged chip
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申请号: US14162718申请日: 2014-01-23
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公开(公告)号: US10132630B2公开(公告)日: 2018-11-20
- 发明人: Terrence Lee , Wenhua Zhang , Sudheer Sridharamurthy , Shingo Yoneoka
- 申请人: mCube Inc.
- 申请人地址: US CA San Jose
- 专利权人: mCube Inc.
- 当前专利权人: mCube Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Kilpatrick Townsend & Stockton LLP
- 主分类号: G01C19/5783
- IPC分类号: G01C19/5783 ; G01C19/56 ; G01P1/00 ; B81B7/00 ; G01P15/18 ; G01P15/02 ; G01P15/08
摘要:
A multi-axis integrated MEMS inertial sensor device. The device can include an integrated 3-axis gyroscope and 3-axis accelerometer on a single chip, creating a 6-axis inertial sensor device. The structure is spatially configured with efficient use of the design area of the chip by adding the accelerometer device to the center of the gyroscope device. The design architecture can be a rectangular or square shape in geometry, which makes use of the whole chip area and maximizes the sensor size in a defined area. The MEMS is centered in the package, which is beneficial to the sensor's temperature performance. Furthermore, the electrical bonding pads of the integrated multi-axis inertial sensor device can be configured in the four corners of the rectangular chip layout. This configuration guarantees design symmetry and efficient use of the chip area.
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