Invention Grant
- Patent Title: Method for low temperature bonding of wafers
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Application No.: US15321701Application Date: 2015-07-09
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Publication No.: US10134607B2Publication Date: 2018-11-20
- Inventor: Vivek Chidambaram , Sunil Wickramanayaka , Jinghui Xu , Zhipeng Ding , Li Yan Siow
- Applicant: Agency for Science, Technology and Research
- Applicant Address: SG Singapore
- Assignee: Agency for Science, Technology and Research
- Current Assignee: Agency for Science, Technology and Research
- Current Assignee Address: SG Singapore
- Agency: Choate, Hall & Stewart LLP
- Priority: SG10201403967Q 20140709
- International Application: PCT/SG2015/050206 WO 20150709
- International Announcement: WO2016/007092 WO 20160114
- Main IPC: B23K20/02
- IPC: B23K20/02 ; B81C3/00 ; C25D3/48 ; H01L23/48 ; H05K1/11 ; H01L23/373 ; H01L23/15 ; H01L21/58 ; H01L21/50 ; B23K35/00 ; H01L23/488

Abstract:
A method for bonding wafers is provided. The method comprises the steps of providing a first wafer having an exposed first layer, the first layer comprising a first metal; and providing a second wafer having an exposed second layer, the second layer comprising a second metal, the first metal and the second metal capable of forming a eutectic mixture having a eutectic melting temperature. The method further comprises the steps of contacting the first layer with the second layer; and applying a predetermined pressure at a predetermined temperature to form a solid-state diffusion bond between the first layer and the second layer, wherein the predetermined temperature is below the eutectic melting temperature.
Public/Granted literature
- US20170178929A1 A Method For Low Temperature Bonding Of Wafers Public/Granted day:2017-06-22
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