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公开(公告)号：US09510121B2
公开(公告)日：2016-11-29
申请号：US14442800
申请日：2013-12-06
Applicant: Agency for Science, Technology and Research
Inventor： Jinghui Xu , Julius Ming Lin Tsai
CPC classification number: H04R29/004 , H04R1/04 , H04R1/326 , H04R3/00 , H04R3/005 , H04R19/005 , H04R31/003 , H04R2201/003 , H04R2499/11
Abstract: According to embodiments of the present invention, a transducer is provided. The transducer includes a substrate, and a diaphragm suspended from the substrate, wherein the diaphragm is displaceable in response to an acoustic signal impinging on the diaphragm, wherein the transducer is configured, in a first mode of operation, to determine a direction of the acoustic signal based on a first displacement of the diaphragm in the first mode of operation, and to decide to accept or reject the acoustic signal based on at least one predetermined parameter and the determined direction of the acoustic signal, and in a second mode of operation, to sense the acoustic signal based on a second displacement of the diaphragm in the second mode of operation if the acoustic signal is accepted in the first mode of operation.
Abstract translation: 根据本发明的实施例，提供了一种换能器。 所述换能器包括衬底和从所述衬底悬挂的隔膜，其中所述隔膜响应于撞击所述隔膜的声学信号而移位，其中所述换能器被配置为在第一操作模式中以确定所述声学的方向 基于第一操作模式中的振膜的第一位移的信号，并且基于至少一个预定参数和所确定的声信号的方向来决定接受或拒绝声信号，并且在第二操作模式中， 如果在第一操作模式中接受声信号，则基于第二操作模式中的振膜的第二位移来感测声信号。
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公开(公告)号：US09321630B2
公开(公告)日：2016-04-26
申请号：US13772183
申请日：2013-02-20
Inventor： Jinghui Xu , Julius Ming-Lin Tsai , Winston Sun , Chengliang Sun
CPC classification number: B81C1/00182 , B81B2201/0257 , G01H11/08 , G01V1/186
Abstract: A method and apparatus for detecting underwater sounds is disclosed. An embodiment of the apparatus includes a substrate with a vacuum-sealed cavity. A support structure and an acoustic pressure sensor are situated on the substrate. The support structure of the apparatus may include a first oxide layer situated on the substrate, a silicon layer situated on the first oxide layer, and a second oxide layer situated on the silicon layer. The acoustic pressure sensor of the apparatus includes a first electrode layer situated on the substrate, a piezoelectric layer situated on the first electrode layer, and a second electrode layer situated on the piezoelectric layer. In one embodiment, the surface area of the second electrode layer is between about 70 to 90 percent of the surface area of the piezoelectric layer. In various embodiments, the support structure is thicker than the piezoelectric layer.
Abstract translation: 公开了一种用于检测水下声音的方法和装置。 该装置的实施例包括具有真空密封空腔的基板。 支撑结构和声压传感器位于基板上。 该装置的支撑结构可以包括位于基板上的第一氧化物层，位于第一氧化物层上的硅层和位于硅层上的第二氧化物层。 设备的声压传感器包括位于基板上的第一电极层，位于第一电极层上的压电层和位于压电层上的第二电极层。 在一个实施例中，第二电极层的表面积在压电层的表面积的约70％至90％之间。 在各种实施例中，支撑结构比压电层厚。
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Patent Agency Ranking
公开(公告)号：US10076772B2
公开(公告)日：2018-09-18
申请号：US14553023
申请日：2014-11-25
Applicant: Agency for Science, Technology and Research
Inventor： Jinghui Xu , Hongbin Yu , Liang Lou , Alex Yuandong Gu
IPC: B06B1/06 , H01L41/053 , H01L41/09 , H01L41/113 , G10K9/122
CPC classification number: B06B1/0644 , B06B1/0651 , G10K9/122 , H01L41/053 , H01L41/0973 , H01L41/1138 , Y10T29/42
Abstract: A transducer is provided, which includes a substrate, wherein a cavity is defined at least partially through the substrate, at least one stopper structure arranged within the cavity, a support layer arranged over the at least one stopper structure and the cavity to seal the cavity, and a piezoelectric functional arrangement arranged on the support layer. According to further embodiments of the present invention, a method for forming a transducer is also provided.
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公开(公告)号：US20180054183A2
公开(公告)日：2018-02-22
申请号：US15114734
申请日：2015-02-11
Applicant: Agency for Science, Technology and Research
Inventor： Jinghui Xu , Nan Wang , Yuandong Alex Gu
CPC classification number: H03H9/02409 , B81B2201/0271 , H01H2001/0078 , H03H9/02448 , H03H9/19 , H03H9/2457 , H03H9/2463 , H03H9/56 , H03H2009/02291 , H03H2009/02488
Abstract: According to various embodiments, there is provided a micro-electromechanical resonator, including a substrate with a cavity therein; and a resonating structure suspended over the cavity, the resonating structure having a first end anchored to the substrate, wherein the resonating structure is configured to flex in a flexural mode along a width direction of the resonating structure, wherein the width direction is defined at least substantially perpendicular to a length direction of the resonating structure, wherein the length direction is defined from the first end to a second end of the resonating structure, wherein the second end opposes the first end.
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公开(公告)号：US10134607B2
公开(公告)日：2018-11-20
申请号：US15321701
申请日：2015-07-09
Applicant: Agency for Science, Technology and Research
Inventor： Vivek Chidambaram , Sunil Wickramanayaka , Jinghui Xu , Zhipeng Ding , Li Yan Siow
IPC: B23K20/02 , B81C3/00 , C25D3/48 , H01L23/48 , H05K1/11 , H01L23/373 , H01L23/15 , H01L21/58 , H01L21/50 , B23K35/00 , H01L23/488
Abstract: A method for bonding wafers is provided. The method comprises the steps of providing a first wafer having an exposed first layer, the first layer comprising a first metal; and providing a second wafer having an exposed second layer, the second layer comprising a second metal, the first metal and the second metal capable of forming a eutectic mixture having a eutectic melting temperature. The method further comprises the steps of contacting the first layer with the second layer; and applying a predetermined pressure at a predetermined temperature to form a solid-state diffusion bond between the first layer and the second layer, wherein the predetermined temperature is below the eutectic melting temperature.
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公开(公告)号：US10211805B2
公开(公告)日：2019-02-19
申请号：US15114734
申请日：2015-02-11
Applicant: Agency for Science, Technology and Research
Inventor： Jinghui Xu , Nan Wang , Yuandong Alex Gu
IPC: H03H9/15 , H03H9/19 , H03H9/46 , H03H9/52 , H03H9/54 , H03H9/02 , H03H9/56 , H03H9/24 , H01H1/00
Abstract: According to various embodiments, there is provided a micro-electromechanical resonator, including a substrate with a cavity therein; and a resonating structure suspended over the cavity, the resonating structure having a first end anchored to the substrate, wherein the resonating structure is configured to flex in a flexural mode along a width direction of the resonating structure, wherein the width direction is defined at least substantially perpendicular to a length direction of the resonating structure, wherein the length direction is defined from the first end to a second end of the resonating structure, wherein the second end opposes the first end.
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公开(公告)号：US20140230557A1
公开(公告)日：2014-08-21
申请号：US13772183
申请日：2013-02-20
Inventor： Jinghui Xu , Julius Ming-Lin Ming-Lin Tsai , Winston Sun , Chengliang Sun
CPC classification number: B81C1/00182 , B81B2201/0257 , G01H11/08 , G01V1/186
Abstract: A method and apparatus for detecting underwater sounds is disclosed. An embodiment of the apparatus includes a substrate with a vacuum-sealed cavity. A support structure and an acoustic pressure sensor are situated on the substrate. The support structure of the apparatus may include a first oxide layer situated on the substrate, a silicon layer situated on the first oxide layer, and a second oxide layer situated on the silicon layer. The acoustic pressure sensor of the apparatus includes a first electrode layer situated on the substrate, a piezoelectric layer situated on the first electrode layer, and a second electrode layer situated on the piezoelectric layer. In one embodiment, the surface area of the second electrode layer is between about 70 to 90 percent of the surface area of the piezoelectric layer. In various embodiments, the support structure is thicker than the piezoelectric layer.
Abstract translation: 公开了一种用于检测水下声音的方法和装置。 该装置的实施例包括具有真空密封空腔的基板。 支撑结构和声压传感器位于基板上。 该装置的支撑结构可以包括位于基底上的第一氧化物层，位于第一氧化物层上的硅层和位于硅层上的第二氧化物层。 设备的声压传感器包括位于基板上的第一电极层，位于第一电极层上的压电层和位于压电层上的第二电极层。 在一个实施例中，第二电极层的表面积在压电层的表面积的约70％至90％之间。 在各种实施例中，支撑结构比压电层厚。
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