- 专利标题: Substrate transport apparatus
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申请号: US14568742申请日: 2014-12-12
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公开(公告)号: US10134621B2公开(公告)日: 2018-11-20
- 发明人: Robert T. Caveney , Ulysses Gilchrist , Alexander Krupyshev
- 申请人: Brooks Automation, Inc.
- 申请人地址: US MA Chelmsford
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Perman & Green, LLP
- 代理商 Colin C. Durham
- 主分类号: H01L21/677
- IPC分类号: H01L21/677 ; B25J11/00 ; H01L21/67
摘要:
A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.
公开/授权文献
- US20150206782A1 SUBSTRATE TRANSPORT APPARATUS 公开/授权日:2015-07-23
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