Invention Grant
- Patent Title: Wafer level packaging of infrared camera detectors
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Application No.: US15369702Application Date: 2016-12-05
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Publication No.: US10161803B2Publication Date: 2018-12-25
- Inventor: Gregory A. Carlson , Alex Matson , Andrew Sharpe , Davey Beard , Paul Schweikert , Robert Simes
- Applicant: FLIR Systems, Inc.
- Applicant Address: US OR Wilsonville
- Assignee: FLIR Systems, Inc.
- Current Assignee: FLIR Systems, Inc.
- Current Assignee Address: US OR Wilsonville
- Agency: Haynes and Boone, LLP
- Main IPC: G01J5/20
- IPC: G01J5/20 ; G01J5/04 ; H04N5/225 ; H04N5/33 ; G01J5/02 ; G01J1/02 ; G01J1/44 ; G01J5/10 ; H01L27/146 ; H01L21/66 ; H01L37/02 ; G01J5/00

Abstract:
An infrared detector useful in, e.g., infrared cameras, includes a substrate having an array of infrared detectors and a readout integrated circuit interconnected with the array disposed on an upper surface thereof, for one or more embodiments. A generally planar window is spaced above the array, the window being substantially transparent to infrared light. A mesa is bonded to the window. The mesa has closed marginal side walls disposed between an outer periphery of a lower surface of the window and an outer periphery of the upper surface of the substrate and defines a closed cavity between the window and the array that encloses the array. A solder seal bonds the mesa to the substrate so as to seal the cavity.
Public/Granted literature
- US20170328779A1 WAFER LEVEL PACKAGING OF INFRARED CAMERA DETECTORS Public/Granted day:2017-11-16
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