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公开(公告)号:US10161803B2
公开(公告)日:2018-12-25
申请号:US15369702
申请日:2016-12-05
申请人: FLIR Systems, Inc.
发明人: Gregory A. Carlson , Alex Matson , Andrew Sharpe , Davey Beard , Paul Schweikert , Robert Simes
IPC分类号: G01J5/20 , G01J5/04 , H04N5/225 , H04N5/33 , G01J5/02 , G01J1/02 , G01J1/44 , G01J5/10 , H01L27/146 , H01L21/66 , H01L37/02 , G01J5/00
摘要: An infrared detector useful in, e.g., infrared cameras, includes a substrate having an array of infrared detectors and a readout integrated circuit interconnected with the array disposed on an upper surface thereof, for one or more embodiments. A generally planar window is spaced above the array, the window being substantially transparent to infrared light. A mesa is bonded to the window. The mesa has closed marginal side walls disposed between an outer periphery of a lower surface of the window and an outer periphery of the upper surface of the substrate and defines a closed cavity between the window and the array that encloses the array. A solder seal bonds the mesa to the substrate so as to seal the cavity.
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公开(公告)号:US20160047691A1
公开(公告)日:2016-02-18
申请号:US13750709
申请日:2013-01-25
申请人: FLIR Systems, Inc.
发明人: Gregory A. Carlson , Alex Matson , Andrew Sharpe , Davey Beard , Paul Schweikert , Robert Simes
IPC分类号: G01J5/10 , H01L27/146 , G01J1/02 , G01J1/44 , G01J5/02
CPC分类号: G01J5/20 , G01J1/0204 , G01J1/44 , G01J5/02 , G01J5/0215 , G01J5/023 , G01J5/046 , G01J5/10 , G01J2005/0077 , G01J2005/204 , H01L22/14 , H01L22/32 , H01L27/146 , H01L27/14618 , H01L27/1462 , H01L27/14632 , H01L27/14636 , H01L27/14669 , H01L27/14687 , H01L27/14698 , H01L37/02 , H04N5/2251 , H04N5/33 , Y10T29/49826
摘要: An infrared detector useful in, e.g., infrared cameras, includes a substrate having an array of infrared detectors and a readout integrated circuit interconnected with the array disposed on an upper surface thereof, for one or more embodiments. A generally planar window is spaced above the array, the window being substantially transparent to infrared light. A mesa is bonded to the window. The mesa has closed marginal side walls disposed between an outer periphery of a lower surface of the window and an outer periphery of the upper surface of the substrate and defines a closed cavity between the window and the array that encloses the array. A solder seal bonds the mesa to the substrate so as to seal the cavity.
摘要翻译: 用于例如红外相机的红外检测器包括具有红外检测器阵列的基板和与设置在其上表面上的阵列互连的读出集成电路,用于一个或多个实施例。 大致平面的窗口在阵列上方间隔开,窗口基本上对于红外光是透明的。 台面粘合到窗户。 台面已经封闭了边缘侧壁,其设置在窗口的下表面的外周边和基板的上表面的外周之间,并且在窗口和包围阵列的阵列之间限定了封闭的空腔。 焊接密封件将台面连接到基板以便密封空腔。
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公开(公告)号:US09513172B2
公开(公告)日:2016-12-06
申请号:US13750709
申请日:2013-01-25
申请人: FLIR Systems, Inc.
发明人: Gregory A. Carlson , Alex Matson , Andrew Sharpe , Davey Beard , Paul Schweikert , Robert Simes
IPC分类号: G01J5/10 , G01J5/04 , H04N5/225 , H04N5/33 , G01J5/02 , G01J5/20 , G01J1/02 , G01J1/44 , H01L27/146 , G01J5/00
CPC分类号: G01J5/20 , G01J1/0204 , G01J1/44 , G01J5/02 , G01J5/0215 , G01J5/023 , G01J5/046 , G01J5/10 , G01J2005/0077 , G01J2005/204 , H01L22/14 , H01L22/32 , H01L27/146 , H01L27/14618 , H01L27/1462 , H01L27/14632 , H01L27/14636 , H01L27/14669 , H01L27/14687 , H01L27/14698 , H01L37/02 , H04N5/2251 , H04N5/33 , Y10T29/49826
摘要: An infrared detector useful in, e.g., infrared cameras, includes a substrate having an array of infrared detectors and a readout integrated circuit interconnected with the array disposed on an upper surface thereof, for one or more embodiments. A generally planar window is spaced above the array, the window being substantially transparent to infrared light. A mesa is bonded to the window. The mesa has closed marginal side walls disposed between an outer periphery of a lower surface of the window and an outer periphery of the upper surface of the substrate and defines a closed cavity between the window and the array that encloses the array. A solder seal bonds the mesa to the substrate so as to seal the cavity.
摘要翻译: 用于例如红外相机的红外检测器包括具有红外检测器阵列的基板和与设置在其上表面上的阵列互连的读出集成电路,用于一个或多个实施例。 大致平面的窗口在阵列上方间隔开,窗口基本上对于红外光是透明的。 台面粘合到窗户。 台面已经封闭了边缘侧壁,其设置在窗口的下表面的外周边和基板的上表面的外周之间,并且在窗口和包围阵列的阵列之间限定了封闭的空腔。 焊接密封件将台面连接到基板以便密封空腔。
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公开(公告)号:US20170328779A1
公开(公告)日:2017-11-16
申请号:US15369702
申请日:2016-12-05
申请人: FLIR Systems, Inc.
发明人: Gregory A. Carlson , Alex Matson , Andrew Sharpe , Davey Beard , Paul Schweikert , Robert Simes
CPC分类号: G01J5/20 , G01J1/0204 , G01J1/44 , G01J5/02 , G01J5/0215 , G01J5/023 , G01J5/046 , G01J5/10 , G01J2005/0077 , G01J2005/204 , H01L22/14 , H01L22/32 , H01L27/146 , H01L27/14618 , H01L27/1462 , H01L27/14632 , H01L27/14636 , H01L27/14669 , H01L27/14687 , H01L27/14698 , H01L37/02 , H04N5/2251 , H04N5/33 , Y10T29/49826
摘要: An infrared detector useful in, e.g., infrared cameras, includes a substrate having an array of infrared detectors and a readout integrated circuit interconnected with the array disposed on an upper surface thereof, for one or more embodiments. A generally planar window is spaced above the array, the window being substantially transparent to infrared light. A mesa is bonded to the window. The mesa has closed marginal side walls disposed between an outer periphery of a lower surface of the window and an outer periphery of the upper surface of the substrate and defines a closed cavity between the window and the array that encloses the array. A solder seal bonds the mesa to the substrate so as to seal the cavity.
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