Invention Grant
- Patent Title: Nanostructured vanadium oxide uncooled bolometers and method of fabrication
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Application No.: US15691109Application Date: 2017-08-30
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Publication No.: US10184839B1Publication Date: 2019-01-22
- Inventor: Ari D. Brown , Emily M. Barrentine , Shahid Aslam
- Applicant: The United States of America as represented by the Administrator of NASA
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Administrator of NASA
- Current Assignee: The United States of America as represented by the Administrator of NASA
- Current Assignee Address: US DC Washington
- Agent Christopher O. Edwards; Bryan A. Geurts; Mark P. Dvorscak
- Main IPC: G01J5/20
- IPC: G01J5/20 ; C23C14/08 ; C23C14/58 ; C23C14/34 ; C23C14/00 ; C23C14/16 ; C23C14/35
Abstract:
The present invention relates to uncooled microbolometers which can be integrated in future thermal instruments engaged in land imaging on future observatories. The present invention includes: (1) developing and characterizing a microstructured VOx thin film, and, (2) fabricating an uncooled microbolometer array over the 8-14 micron spectral band.
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