- 专利标题: Micro pick and bond assembly
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申请号: US15512342申请日: 2014-10-17
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公开(公告)号: US10204808B2公开(公告)日: 2019-02-12
- 发明人: Peter L. Chang , Chytra Pawashe , Michael C. Mayberry , Jia-Hung Tseng
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Green, Howard & Mughal LLP
- 国际申请: PCT/US2014/061053 WO 20141017
- 国际公布: WO2016/060677 WO 20160421
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L23/00 ; H01L21/683 ; H01L25/075 ; H01L33/00 ; H01L33/36 ; H01L33/44 ; H01L33/62
摘要:
Micro pick-and-bond heads, assembly methods, and device assemblies. In, embodiments, micro pick-and-bond heads transfer micro device elements, such as (micro) LEDs, en masse from a source substrate to a target substrate, such as a LED display substrate. Anchor and release structures on the source substrate enable device elements to be separated from a source substrate, while pressure sensitive adhesive (PSA) enables device elements to be temporarily affixed to pedestals of a micro pick-and-bond head. Once the device elements are permanently affixed to a target substrate, the PSA interface may be defeated through peeling and/or thermal decomposition of an interface layer.
公开/授权文献
- US10242892B2 Micro pick and bond assembly 公开/授权日:2019-03-26
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