Invention Grant
- Patent Title: Substrate transport apparatus with active edge gripper
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Application No.: US14148785Application Date: 2014-01-07
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Publication No.: US10204811B2Publication Date: 2019-02-12
- Inventor: Michael Duhamel , Richard J. Pickreign
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: B65G29/00
- IPC: B65G29/00 ; H01L21/677 ; H01L21/67 ; H01L21/687

Abstract:
In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.
Public/Granted literature
- US20140119856A1 SUBSTRATE TRANSPORT APPARATUS WITH ACTIVE EDGE GRIPPER Public/Granted day:2014-05-01
Information query
IPC分类: