公开(公告)号：US10204811B2

公开(公告)日：2019-02-12

申请号：US14148785

申请日：2014-01-07

Applicant: Brooks Automation, Inc.

Inventor： Michael Duhamel ,  Richard J. Pickreign

IPC: B65G29/00 ,  H01L21/677 ,  H01L21/67 ,  H01L21/687

Abstract: In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.

公开(公告)号：US20140119856A1

公开(公告)日：2014-05-01

申请号：US14148785

申请日：2014-01-07

Applicant: Brooks Automation, Inc.

Inventor： Michael Duhamel ,  Richard J. Pickreign

IPC: H01L21/677

CPC classification number: H01L21/677 ,  H01L21/67276 ,  H01L21/67727 ,  H01L21/68707 ,  Y10S414/135

Abstract: In accordance with one aspect of the exemplary embodiments, a substrate transport apparatus is provided comprising a drive mechanism, a movable arm assembly connected to the drive mechanism, an end effector connected to the arm assembly. A chuck for holding a substrate is mounted on the end effector and having a movable edge gripper with a contact surface and an edge of the substrate may be gripped by actuating the movable edge gripper to engage the substrate with the contact surface. The apparatus further comprising a motion sensor for providing a signal to actuate the movable edge gripper to close and open the moveable edge gripper for capturing and releasing the substrate.

Abstract translation: 根据示例性实施例的一个方面，提供了一种基板输送装置，其包括驱动机构，连接到驱动机构的可动臂组件，连接到臂组件的端部执行器。 用于保持基板的卡盘安装在端部执行器上并且具有带有接触表面的可动边缘夹持器，并且可以通过致动可动边缘夹持器来夹持基板的边缘以将基板与接触表面接合。 该装置还包括运动传感器，用于提供信号以致动可动边缘夹持器，以闭合和打开用于捕获和释放衬底的可移动边缘夹持器。