Invention Grant
- Patent Title: Apparatus for treating substrate
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Application No.: US14725515Application Date: 2015-05-29
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Publication No.: US10232415B2Publication Date: 2019-03-19
- Inventor: Gil Hun Song , Ki Ryong Choi , Young Chol Choi , Giu Su Park , Sun Yong Park
- Applicant: Semes Co., Ltd.
- Applicant Address: KR Chungcheongnam-do KR Gyeonggi-do
- Assignee: Semes Co., Ltd.,Samsung Electronics Co., Ltd.
- Current Assignee: Semes Co., Ltd.,Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-do KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2014-0065389 20140529
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B13/00

Abstract:
A substrate-treating apparatus is disclosed. The substrate-treating apparatus may include a vessel configured to provide a treatment space therein, a substrate-supporting unit provided in the vessel to support a substrate, and a spraying member configured to spray treatment solution on the substrate loaded on the substrate-supporting unit. The vessel may have an inner side surface, on which at least one texture pattern is formed.
Public/Granted literature
- US20150343496A1 APPARATUS FOR TREATING SUBSTRATE Public/Granted day:2015-12-03
Information query
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