公开(公告)号：US11933808B2

公开(公告)日：2024-03-19

申请号：US17564676

申请日：2021-12-29

Applicant: SEMES CO., LTD.

Inventor： Young Seop Choi ,  Yong-Jun Seo ,  Sang Hyun Son ,  Ji Young Lee ,  Gyeong Ryul Kim ,  Sun Yong Park

IPC: G01P1/02 ,  G01C9/00 ,  G01P15/18 ,  H02J7/02 ,  H02J50/10

CPC classification number: G01P1/023 ,  G01C9/00 ,  G01P15/18 ,  H02J7/02 ,  H02J50/10

Abstract: A buffer unit for temporarily storing a substrate includes a housing having a space for storing a substrate therein, one or more slots disposed within the housing for placing a substrate thereon, and a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module. A substrate type sensor is stored at the holding unit.

公开(公告)号：US10699918B2

公开(公告)日：2020-06-30

申请号：US15484377

申请日：2017-04-11

Applicant: SEMES CO., LTD.

Inventor： Buyoung Jung ,  Jin Tack Yu ,  Gil Hun Song ,  Sun Yong Park

IPC: H01L21/67 ,  B05B1/14 ,  B08B3/08

Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus comprises: a housing having a treating space therein; a spin head for supporting and rotating a substrate in the treating space; and a chemical supply unit having an injection nozzle for supplying a chemical to the substrate which is supported by the spin head, wherein the injection nozzle comprises a nozzle body, and wherein the nozzle body comprises an inner space for receiving a chemical and minute holes which are connected with the inner space for discharging the chemicals to downward.

公开(公告)号：US12224189B2

公开(公告)日：2025-02-11

申请号：US17564562

申请日：2021-12-29

Applicant: SEMES CO., LTD.

Inventor： Young Seop Choi ,  Yong-Jun Seo ,  Sang Hyun Son ,  Jun Gwon Lee ,  Hak Hyon Kim ,  Sun Yong Park

IPC: H01L21/67 ,  C23C16/02 ,  C23C16/455 ,  C23C16/52 ,  G01L5/00 ,  G01L19/08 ,  G01L19/14

Abstract: A substrate type sensor includes a substrate shape member, a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors, a central module including a transmission unit, the reception unit receiving data from the pressure sensor panel, and a battery proving power to the pressure sensor panel and the central module.

公开(公告)号：US10232415B2

公开(公告)日：2019-03-19

申请号：US14725515

申请日：2015-05-29

Applicant: Semes Co., Ltd.

Inventor： Gil Hun Song ,  Ki Ryong Choi ,  Young Chol Choi ,  Giu Su Park ,  Sun Yong Park

IPC: H01L21/67 ,  B08B13/00

Abstract: A substrate-treating apparatus is disclosed. The substrate-treating apparatus may include a vessel configured to provide a treatment space therein, a substrate-supporting unit provided in the vessel to support a substrate, and a spraying member configured to spray treatment solution on the substrate loaded on the substrate-supporting unit. The vessel may have an inner side surface, on which at least one texture pattern is formed.