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公开(公告)号：US10232415B2
公开(公告)日：2019-03-19
申请号：US14725515
申请日：2015-05-29
Applicant: Semes Co., Ltd.
Inventor： Gil Hun Song , Ki Ryong Choi , Young Chol Choi , Giu Su Park , Sun Yong Park
Abstract: A substrate-treating apparatus is disclosed. The substrate-treating apparatus may include a vessel configured to provide a treatment space therein, a substrate-supporting unit provided in the vessel to support a substrate, and a spraying member configured to spray treatment solution on the substrate loaded on the substrate-supporting unit. The vessel may have an inner side surface, on which at least one texture pattern is formed.
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