- 专利标题: Magnetic annealing apparatus
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申请号: US14840486申请日: 2015-08-31
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公开(公告)号: US10254046B2公开(公告)日: 2019-04-09
- 发明人: Mitsuru Yamazaki , Barry Clarke , Ian Colgan , George Eyres , Ioan Domsa
- 申请人: Tokyo Electron Limited
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Abelman, Frayne & Schwab
- 优先权: JP2014-179343 20140903
- 主分类号: F27B5/08
- IPC分类号: F27B5/08 ; F27B5/14 ; F27D1/00 ; F27D7/06 ; H01L43/12 ; F27B17/00 ; F27D99/00 ; H01L21/67 ; H01L21/677 ; F27D5/00 ; H01L21/673
摘要:
Disclosed is a magnetic annealing apparatus including a processing container having a horizontally-elongated tubular shape and configured to perform a magnetic annealing processing on a plurality of substrates accommodated therein in a magnetic field; a heating unit provided to cover at least a part of a surface of the processing container that extends in a longitudinal direction, from outside; a magnet provided to cover the heating unit from the outside of the heating unit; a substrate holder configured to hold the plurality of substrates within the processing container; and a heat shielding plate provided to surround a part of the substrate holder.
公开/授权文献
- US20160061526A1 MAGNETIC ANNEALING APPARATUS 公开/授权日:2016-03-03
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