- 专利标题: Sub-pulsing during a state
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申请号: US16000348申请日: 2018-06-05
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公开(公告)号: US10256077B2公开(公告)日: 2019-04-09
- 发明人: John C. Valcore, Jr. , Harmeet Singh , Bradford J. Lyndaker
- 申请人: Lam Research Corporation
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Penilla IP, APC
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H03L7/00 ; H03K3/01 ; H03L7/06 ; H05H1/46
摘要:
A method for achieving sub-pulsing during a state is described. The method includes receiving a clock signal from a clock source, the clock signal having two states and generating a pulsed signal from the clock signal. The pulsed signal has sub-states within one of the states. The sub-states alternate with respect to each other at a frequency greater than a frequency of the states. The method includes providing the pulsed signal to control power of a radio frequency (RF) signal that is generated by an RF generator. The power is controlled to be synchronous with the pulsed signal.
公开/授权文献
- US20180294140A1 Sub-Pulsing During a State 公开/授权日:2018-10-11
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