Invention Grant
- Patent Title: Optimizing training sets used for setting up inspection-related algorithms
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Application No.: US15782820Application Date: 2017-10-12
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Publication No.: US10267748B2Publication Date: 2019-04-23
- Inventor: Martin Plihal , Erfan Soltanmohammadi , Saravanan Paramasivam , Sairam Ravu , Ankit Jain , Sarath Shekkizhar , Prasanti Uppaluri
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Priority: IN2016/41035490 20161017
- Main IPC: G06N5/00
- IPC: G06N5/00 ; G01N21/55 ; G01N21/88 ; G01N21/95 ; G06N99/00 ; G01N21/956

Abstract:
Methods and systems for training an inspection-related algorithm are provided. One system includes one or more computer subsystems configured for performing an initial training of an inspection-related algorithm with a labeled set of defects thereby generating an initial version of the inspection-related algorithm and applying the initial version of the inspection-related algorithm to an unlabeled set of defects. The computer subsystem(s) are also configured for altering the labeled set of defects based on results of the applying. The computer subsystem(s) may then iteratively re-train the inspection-related algorithm and alter the labeled set of defects until one or more differences between results produced by a most recent version and a previous version of the algorithm meet one or more criteria. When the one or more differences meet the one or more criteria, the most recent version of the inspection-related algorithm is outputted as the trained algorithm.
Public/Granted literature
- US20180106732A1 Optimizing Training Sets Used for Setting Up Inspection-Related Algorithms Public/Granted day:2018-04-19
Information query
IPC分类:
G | 物理 |
G06 | 计算;推算或计数 |
G06N | 基于特定计算模型的计算机系统 |
G06N5/00 | 利用基于知识的模式的计算机系统 |