Invention Grant
- Patent Title: Non-volatile memory structures having multi-layer conductive channels
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Application No.: US15477051Application Date: 2017-04-01
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Publication No.: US10269824B2Publication Date: 2019-04-23
- Inventor: Changhan Kim , Scott M. Pook
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Thorpe North & Western, LLP
- Agent David W. Osborne
- Main IPC: H01L27/1157
- IPC: H01L27/1157 ; H01L27/11582 ; H01L21/02 ; G11C16/10 ; G11C16/04

Abstract:
Conductive channel technology is disclosed. In one example, a memory component can include a source line, a conductive channel having first and second conductive layers electrically coupled to the source line and memory cells adjacent to the conductive channel. In one aspect, channel conductivity and reliability is improved over a single layer conductive channel formation scheme by preventing unwanted oxide formation, increasing the interface contact area, and by modulating material grain size and boundaries via multiple thin channel integration scheme. Associated systems and methods are also disclosed.
Public/Granted literature
- US20180286874A1 CONDUCTIVE CHANNELS AND SOURCE LINE COUPLING Public/Granted day:2018-10-04
Information query
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