Invention Grant
- Patent Title: Stacked nanosheet field-effect transistor with air gap spacers
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Application No.: US15590409Application Date: 2017-05-09
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Publication No.: US10269983B2Publication Date: 2019-04-23
- Inventor: Julien Frougier , Ruilong Xie , Hui Zang , Kangguo Cheng , Tenko Yamashita , Chun-chen Yeh
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/786 ; H01L29/66 ; H01L29/423 ; H01L29/12 ; H01L29/41

Abstract:
Structures for a nanosheet field-effect transistor and methods for forming a structure for a nanosheet field-effect transistor. A fin is formed that includes a first nanosheet channel layer and a second nanosheet channel layer arranged in a vertical stack. A cavity is formed between a portion of the first nanosheet channel layer and a portion of the second nanosheet channel layer. An epitaxially-grown source/drain region is connected with the portion of the first nanosheet channel layer and the portion of the second nanosheet channel layer. A gate structure is formed that includes a section located in a space between the first nanosheet channel layer and the second nanosheet channel layer. The cavity is surrounded by the first nanosheet channel layer, the second nanosheet channel layer, the section of the gate structure, and the source/drain region to define an air gap spacer.
Public/Granted literature
- US20180331232A1 STACKED NANOSHEET FIELD-EFFECT TRANSISTOR WITH AIRGAP SPACERS Public/Granted day:2018-11-15
Information query
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