- 专利标题: Screen printing electrical contacts to nanostructured areas
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申请号: US15622422申请日: 2017-06-14
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公开(公告)号: US10269995B2公开(公告)日: 2019-04-23
- 发明人: Michael Jura , Marcie R. Black , Jeffrey B. Miller , Joanne Yim , Joanne Forziati , Brian P. Murphy , Richard Chleboski
- 申请人: Advanced Silicon Group, Inc.
- 申请人地址: US MA Lincoln
- 专利权人: Advanced Silicon Group, Inc.
- 当前专利权人: Advanced Silicon Group, Inc.
- 当前专利权人地址: US MA Lincoln
- 代理机构: Lando & Anastasi, LLP
- 主分类号: H01L31/044
- IPC分类号: H01L31/044 ; H01L31/0236 ; B82Y30/00 ; H01L31/0224 ; H01L31/0352 ; H01L31/0216 ; H01L31/0312 ; H01L31/0368 ; H01L31/0376 ; H01L31/18 ; H01L29/06
摘要:
A process is provided for contacting a nanostructured surface. The process may include (a) providing a substrate having a nanostructured material on a surface, (b) passivating the surface on which the nanostructured material is located, (c) screen printing onto the nanostructured surface and (d) firing the screen printing ink at a high temperature. In some embodiments, the nanostructured material compromises silicon. In some embodiments, the nanostructured material includes silicon nanowires. In some embodiments, the nanowires are around 150 nm, 250 nm, or 400 nm in length. In some embodiments, the nanowires have a diameter range between about 30 nm and about 200 nm. In some embodiments, the nanowires are tapered such that the base is larger than the tip. In some embodiments, the nanowires are tapered at an angle of about 1 degree, about 3 degrees, or about 10 degrees. In some embodiments, a high temperature can be approximately 700 C, 750 C, 800 C, or 850 C.
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