Invention Grant
- Patent Title: Air-gap spacers for field-effect transistors
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Application No.: US15376831Application Date: 2016-12-13
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Publication No.: US10319627B2Publication Date: 2019-06-11
- Inventor: Chanro Park , Min Gyu Sung , Hoon Kim , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/768 ; H01L29/66

Abstract:
Structures for air-gap spacers in a field-effect transistor and methods for forming air-gap spacers in a field-effect transistor. A gate structure is formed on a top surface of a semiconductor body. A dielectric spacer is formed adjacent to a vertical sidewall of the gate structure. A semiconductor layer is formed on the top surface of the semiconductor body. The semiconductor layer is arranged relative to the vertical sidewall of the gate structure such that a first section of the first dielectric spacer is located in a space between the semiconductor layer and the vertical sidewall of the gate structure. A second section of the dielectric spacer that is located above a top surface of the semiconductor layer is removed. An air-gap spacer is formed in a space from which the second section of the dielectric spacer is removed.
Public/Granted literature
- US20180166319A1 AIR-GAP SPACERS FOR FIELD-EFFECT TRANSISTORS Public/Granted day:2018-06-14
Information query
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