Invention Grant
- Patent Title: Transistor element including a buried insulating layer having enhanced functionality
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Application No.: US15622497Application Date: 2017-06-14
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Publication No.: US10319732B2Publication Date: 2019-06-11
- Inventor: Ralf Richter , Jochen Willi. Poth , Sven Beyer , Stefan Duenkel , Sandhya Chandrashekhar , Zhi-Yuan Wu
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L27/11568
- IPC: H01L27/11568 ; H01L29/06 ; H01L29/423 ; H01L29/792 ; H01L29/66 ; H01L21/84 ; H01L29/786

Abstract:
In sophisticated SOI transistor elements, the buried insulating layer may be specifically engineered so as to include non-standard dielectric materials. For instance, a charge-trapping material and/or a high-k dielectric material and/or a ferroelectric material may be incorporated into the buried insulating layer. In this manner, non-volatile storage transistor elements with superior performance may be obtained and/or efficiency of a back-bias mechanism may be improved.
Public/Granted literature
- US20180366484A1 TRANSISTOR ELEMENT INCLUDING A BURIED INSULATING LAYER HAVING ENHANCED FUNCTIONALITY Public/Granted day:2018-12-20
Information query
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