Invention Grant
- Patent Title: Height measurement using optical interference
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Application No.: US16110626Application Date: 2018-08-23
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Publication No.: US10330458B2Publication Date: 2019-06-25
- Inventor: Richard A. Haight , James B. Hannon , Rudolf M. Tromp
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02 ; G01B11/14 ; G03F7/20 ; G01B11/06

Abstract:
Systems for measuring a distance include a lens positioned a distance above a target surface. A camera is configured to measure a first interference pattern between the lens and the target surface using a light source at a first wavelength and to measure a second interference pattern between the lens and the target surface using a light source at a second wavelength. A processor is configured to determine an absolute measurement of the distance between the lens and the target surface based on the first interference pattern and the second interference pattern.
Public/Granted literature
- US20180364023A1 HEIGHT MEASUREMENT USING OPTICAL INTERFERENCE Public/Granted day:2018-12-20
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