Measuring spherical and chromatic aberrations in cathode lens electrode microscopes

    公开(公告)号:US10283315B2

    公开(公告)日:2019-05-07

    申请号:US15596850

    申请日:2017-05-16

    Inventor: Rudolf M. Tromp

    Abstract: An electron microscope system and a method of measuring an aberration of the electron microscope system are disclosed. An aperture filters an electron beam at a diffraction plane of the electron microscope to pass through electrons having a selected energy and momentum. A displacement of an image of the passed electrons is measured at a detector in an image plane of the electron microscope. An aberration coefficient of the electron microscope is determined from the measured displacement and at least one of the energy and momentum of the passed electrons. The measured aberration can be used to alter a parameter of the electron microscope or an optical element of the electron microscope to thereby control the overall aberration of the electron microscope.

    Scanning transmission electron microscope having multiple beams and post-detection image correction
    8.
    发明授权
    Scanning transmission electron microscope having multiple beams and post-detection image correction 有权
    具有多个光束的扫描透射电子显微镜和后检测图像校正

    公开(公告)号:US09552961B2

    公开(公告)日:2017-01-24

    申请号:US14683679

    申请日:2015-04-10

    Inventor: Rudolf M. Tromp

    Abstract: Embodiments are directed to an information processing system for generating a corrected image of a sample. The system includes a detector, a memory communicatively coupled to the detector, and a post-detection image processor communicatively coupled to the memory and the detector. The detector is configured to detect data of a plurality of moving particles, wherein the data of the plurality of moving particles correspond to an uncorrected image of the sample, and wherein the uncorrected image includes defocus, astigmatism and spherical aberration. The post-detection image processor is configured to generate a corrected image of the sample based at least in part on processing the detected data of the plurality of moving particles.

    Abstract translation: 实施例涉及用于产生样本的校正图像的信息处理系统。 该系统包括检测器,通信地耦合到检测器的存储器,以及通信地耦合到存储器和检测器的后检测图像处理器。 检测器被配置为检测多个移动粒子的数据,其中多个移动粒子的数据对应于样本的未校正图像,并且其中未校正的图像包括散焦,散光和球面像差。 后检测图像处理器被配置为至少部分地基于处理多个移动粒子的检测数据来生成样本的校正图像。

    MEASURING SPHERICAL AND CHROMATIC ABERRATIONS IN CATHODE LENS ELECTRODE MICROSCOPES

    公开(公告)号:US20190206655A1

    公开(公告)日:2019-07-04

    申请号:US16294017

    申请日:2019-03-06

    Inventor: Rudolf M. Tromp

    Abstract: An electron microscope system and a method of measuring an aberration of the electron microscope system are disclosed. A method of controlling an aberration of an electron microscope includes obtaining a dispersed energy distribution for electrons at a diffraction plane of the electron microscope and placing an aperture at a selected location of the dispersed energy distribution in the diffraction plane. The method measures displacement of an image of the aperture in an image plane of the electron microscope for the selected location of the aperture. The method determines an aberration coefficient of the electron microscope from the measured displacement and the selected location of the aperture and alters a parameter of an element of the electron microscope to control the aberration of the electron microscope based at least in part on the determined aberration coefficient.

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