Invention Grant
- Patent Title: Method and apparatus for treating substrate
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Application No.: US15195262Application Date: 2016-06-28
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Publication No.: US10335836B2Publication Date: 2019-07-02
- Inventor: Taekyoub Lee
- Applicant: Semes Co., Ltd.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Jenkins, Wilson, Taylor & Hunt, P.A.
- Priority: KR10-2015-0093162 20150630
- Main IPC: B08B3/02
- IPC: B08B3/02 ; H01L21/02 ; H01L21/67

Abstract:
A method for treating a substrate with a treatment liquid is disclosed, wherein the substrate is treated while a location at which the treatment liquid is supplied onto the substrate that is rotated is moved in an outward direction from a central area of the substrate towards a peripheral area of the substrate and in an inward direction from a peripheral area of the substrate towards a central area of the substrate a plurality of times, and wherein the movement distances of some of the plurality of movements are different from each other.
Public/Granted literature
- US20170001221A1 METHOD AND APPARATUS FOR TREATING SUBSTRATE Public/Granted day:2017-01-05
Information query
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