Invention Grant
- Patent Title: Doping of a substrate via a dopant containing polymer film
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Application No.: US15404675Application Date: 2017-01-12
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Publication No.: US10340144B2Publication Date: 2019-07-02
- Inventor: Rachel A. Segalman , Peter Trefonas, III , Bhooshan C. Popere , Andrew T. Heitsch
- Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA , Rohm and Haas Electronic Materials LLC , Dow Global Technologies, LLC
- Applicant Address: US MA Marlborough US MI Midland US CA Oakland
- Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC,DOW GLOBAL TECHNOLOGIES, LLC,THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC,DOW GLOBAL TECHNOLOGIES, LLC,THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- Current Assignee Address: US MA Marlborough US MI Midland US CA Oakland
- Agency: Cantor Colburn LLP
- Main IPC: H01L21/225
- IPC: H01L21/225 ; H01L21/02 ; H01L21/22 ; C09D153/00 ; H01L21/3105 ; H01L29/167 ; H01L29/207

Abstract:
Disclosed herein is a method for doping a substrate, comprising disposing a coating of a composition comprising a copolymer, a dopant precursor and a solvent on a substrate; where the copolymer is capable of phase segregating and embedding the dopant precursor while in solution; and annealing the substrate at a temperature of 750 to 1300° C. for 0.1 second to 24 hours to diffuse the dopant into the substrate. Disclosed herein too is a semiconductor substrate comprising embedded dopant domains of diameter 3 to 30 nanometers; where the domains comprise Group 13 or Group 15 atoms, wherein the embedded spherical domains are located within 30 nanometers of the substrate surface.
Public/Granted literature
- US20170194150A1 DOPING OF A SUBSTRATE VIA A DOPANT CONTAINING POLYMER FILM Public/Granted day:2017-07-06
Information query
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