Invention Grant
- Patent Title: Cobalt plated via integration scheme
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Application No.: US15860318Application Date: 2018-01-02
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Publication No.: US10340183B1Publication Date: 2019-07-02
- Inventor: Qiang Fang , Shafaat Ahmed , Zhiguo Sun , Jiehui Shu , Dinesh R. Koli , Wei-Tsu Tseng
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/532

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a cobalt plated via integration scheme and methods of manufacture. The structure includes: a via structure composed of cobalt material; and a wiring structure above the via structure. The wiring structure is lined with a barrier liner and the cobalt material and filled with conductive material.
Public/Granted literature
- US20190206729A1 COBALT PLATED VIA INTEGRATION SCHEME Public/Granted day:2019-07-04
Information query
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