Invention Grant
- Patent Title: Method of producing an interposer-chip-arrangement for dense packaging of chips
-
Application No.: US15726905Application Date: 2017-10-06
-
Publication No.: US10340254B2Publication Date: 2019-07-02
- Inventor: Jochen Kraft , Martin Schrems , Franz Schrank
- Applicant: ams AG
- Applicant Address: AT Unterpremstaetten
- Assignee: ams AG
- Current Assignee: ams AG
- Current Assignee Address: AT Unterpremstaetten
- Agency: Fish & Richardson P.C.
- Priority: EP13198854 20131220
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L25/065 ; H01L23/48 ; H01L23/00 ; H01L25/00 ; H01L23/498 ; H01L21/683 ; H01L21/56 ; H01L21/48 ; H01L23/14 ; H01L23/538

Abstract:
The method of producing an interposer-chip-arrangement, comprises providing an interposer (1) with an integrated circuit (25), arranging a dielectric layer (2) with metal layers embedded in the dielectric layer above a main surface (10) of the interposer, connecting the integrated circuit with at least one of the metal layers, forming an interconnection (7) through the interposer, the interconnection contacting one of the metal layers, arranging a further dielectric layer (3) above a further main surface (11) of the interposer opposite the main surface and arranging a further metal layer in or on the further dielectric layer, the further metal layer being connected with the interconnection, arranging a chip provided with at least one contact pad at the main surface or at the further main surface, and electrically conductively connecting the contact pad with the interconnection.
Public/Granted literature
- US20180096969A1 METHOD OF PRODUCING AN INTERPOSER-CHIP-ARRANGEMENT FOR DENSE PACKAGING OF CHIPS Public/Granted day:2018-04-05
Information query
IPC分类: