Invention Grant
- Patent Title: Polishing composition comprising an amine-containing surfactant
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Application No.: US15629487Application Date: 2017-06-21
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Publication No.: US10344186B2Publication Date: 2019-07-09
- Inventor: Alexander W. Hains , Tina Li
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson; Benjamin F. Strick
- Main IPC: B24B37/04
- IPC: B24B37/04 ; C09G1/02 ; C09K3/14

Abstract:
The invention provides a chemical-mechanical polishing composition comprising (a) wet-process ceria abrasive, (b) a surfactant comprising an amine-containing anchor group and ethylene oxide-propylene oxide stabilizing group, wherein the surfactant has a molecular weight of from about 1000 Daltons to about 5000 Daltons, (c) an aromatic carboxylic acid or heteroaromatic carboxylic acid, and (d) water, wherein the polishing composition has a pH of about 3 to about 6. The invention further provides a method of chemically mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrates contain silicon oxide.
Public/Granted literature
- US20170369742A1 POLISHING COMPOSITION COMPRISING AN AMINE-CONTAINING SURFACTANT Public/Granted day:2017-12-28
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