Invention Grant
- Patent Title: Semi-volatile embedded memory with between-fin floating-gate device and method
-
Application No.: US15576269Application Date: 2015-06-26
-
Publication No.: US10355005B2Publication Date: 2019-07-16
- Inventor: Uygar E. Avci , Daniel H. Morris , Ian A. Young , Stephen M. Ramey
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2015/038079 WO 20150626
- International Announcement: WO2016/209280 WO 20161229
- Main IPC: H01L27/11521
- IPC: H01L27/11521 ; G11C16/04 ; H01L21/28 ; H01L29/49 ; H01L29/78 ; H01L29/788 ; H01L27/11519 ; H01L27/11558 ; G11C16/10 ; G11C16/14 ; G11C16/26 ; H01L27/11526 ; H01L29/66 ; H01L21/762 ; H01L27/02 ; H01L29/06

Abstract:
Embodiments of the present disclosure provide techniques and configurations for semi-volatile embedded memory with between-fin floating gates. In one embodiment, an apparatus includes a semiconductor substrate and a floating-gate memory structure formed on the semiconductor substrate including a bitcell having first, second, and third fin structures extending from the substrate, an oxide layer disposed between the first and second fin structures and between the second and third fin structures, a gate of a first transistor disposed on the oxide layer and coupled with and extending over a top of the first fin structure, and a floating gate of a second transistor disposed on the oxide layer between the second and third fin structures. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20180151578A1 SEMI-VOLATILE EMBEDDED MEMORY WITH BETWEEN-FIN FLOATING-GATE DEVICE AND METHOD Public/Granted day:2018-05-31
Information query
IPC分类: