Invention Grant
- Patent Title: Polymer composite vacuum components
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Application No.: US14994969Application Date: 2016-01-13
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Publication No.: US10359332B2Publication Date: 2019-07-23
- Inventor: Brandon J. Kelly , Clinton L. Percy , Scott C. Heinbuch , Gerardo A. Brucker , Timothy C. Swinney , Timothy R. Piwonka-Corle
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L21/34
- IPC: G01L21/34 ; B29C45/14 ; G01L21/30 ; G01L19/00 ; B29K23/00 ; B29K69/00 ; B29K71/00 ; B29L31/00
Abstract:
A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
Public/Granted literature
- US20160209288A1 Polymer Composite Vacuum Components Public/Granted day:2016-07-21
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