Invention Grant
- Patent Title: Method for integrated circuit manufacturing
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Application No.: US15043961Application Date: 2016-02-15
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Publication No.: US10360339B2Publication Date: 2019-07-23
- Inventor: Hung-Chun Wang , Ching-Hsu Chang , Chun-Hung Wu , Cheng Kun Tsai , Feng-Ju Chang , Feng-Lung Lin , Ming-Hsuan Wu , Ping-Chieh Wu , Ru-Gun Liu , Wen-Chun Huang , Wen-Hao Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/00 ; G03F7/20 ; G03F1/36 ; H01L27/02

Abstract:
Provided is an integrated circuit (IC) manufacturing method. The method includes receiving an IC design layout, wherein the IC design layout includes multiple IC regions and each of the IC regions includes an initial IC pattern. The method further includes performing a correction process to a first IC region, thereby modifying the initial IC pattern in the first IC region to result in a first corrected IC pattern in the first IC region, wherein the correction process includes location effect correction. The method further includes replacing the initial IC pattern in a second IC region with the first corrected IC pattern.
Public/Granted literature
- US20160162627A1 Method for Integrated Circuit Manufacturing Public/Granted day:2016-06-09
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