Invention Grant
- Patent Title: Nitride semiconductor ultraviolet light emitting device and method for manufacturing same
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Application No.: US15757203Application Date: 2015-10-27
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Publication No.: US10361346B2Publication Date: 2019-07-23
- Inventor: Akira Hirano , Ko Aosaki
- Applicant: Soko Kagaku Co., Ltd. , AGC INC.
- Applicant Address: JP Ishikawa JP Tokyo
- Assignee: SOKO KAGAKU CO., LTD.,AGC INC.
- Current Assignee: SOKO KAGAKU CO., LTD.,AGC INC.
- Current Assignee Address: JP Ishikawa JP Tokyo
- Agency: Haynes Beffel & Wolfeld LLP
- International Application: PCT/JP2015/080256 WO 20151027
- International Announcement: WO2017/072859 WO 20170504
- Main IPC: H01L31/0312
- IPC: H01L31/0312 ; H01L33/56 ; H01L33/20 ; H01L33/00 ; H01L33/06 ; H01L33/22 ; H01L33/32 ; H01L33/38 ; H01L33/44 ; H01L33/58 ; H01L33/62 ; H01L33/54

Abstract:
A nitride semiconductor ultraviolet light emitting device 1 is configured such that a nitride semiconductor ultraviolet light emitting element 10 is mounted on a base 30 by flip-chip mounting and sealed with an amorphous fluororesin whose terminal functional group is perfluoroalkyl group. The nitride semiconductor ultraviolet light emitting element 10 includes a sapphire substrate 11, a semiconductor laminated portion 12 of an AlGaN-based semiconductor laminated on a front surface of the sapphire substrate 11, an n electrode 13, a p electrode 14 and a back surface covering layer 15 which is formed on a back surface of the sapphire substrate 11 and transmits ultraviolet light. The back surface covering layer 15 has apertures 16 through which a part of the back surface of the sapphire substrate 11 is exposed, the apertures 16 is uniformly dispersed or distributed on the back surface of the sapphire substrate, a cross-sectional shape of the apertures 16 vertical to the back surface of the sapphire substrate 11 has a portion where an aperture width of a part close to the back surface is wider than an aperture width of a part far from the back surface, and the amorphous fluororesin covers the front surface of the back surface covering layer 15 and fills insides of the apertures 16.
Public/Granted literature
- US20180277723A1 Nitride Semiconductor Ultraviolet Light Emitting Device and Method for Manufacturing Same Public/Granted day:2018-09-27
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