Invention Grant
- Patent Title: Method and system for noise mitigation in a multi-beam scanning electron microscopy system
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Application No.: US15267223Application Date: 2016-09-16
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Publication No.: US10366862B2Publication Date: 2019-07-30
- Inventor: Doug K. Masnaghetti , Richard R. Simmons , Mark A. McCord , Rainer Knippelmeyer
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporaton
- Current Assignee: KLA-Tencor Corporaton
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/28 ; H01J37/09

Abstract:
A scanning electron microscopy system is disclosed. The system includes a multi-beam scanning electron microscopy (SEM) sub-system. The SEM sub-system includes a multi-beam electron beam source configured to generate a plurality of electron beams, a sample stage configured to secure a sample, an electron-optical assembly, and a detector assembly configured to detect a plurality of electron signal beams emanating from the surface of the sample to form a plurality of images, each image associated with an electron beam of the plurality of electron beams. The system includes a controller configured to receive the images from the detector assembly, compare two or more of the images to identify common noise components present in the two or more images, and remove the identified common noise components from one or more images of the plurality of images.
Public/Granted literature
- US20170084423A1 Method and System for Noise Mitigation in a Multi-Beam Scanning Electron Microscopy System Public/Granted day:2017-03-23
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