- 专利标题: Method for locating a wafer in the ingot of same
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申请号: US14909230申请日: 2014-08-01
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公开(公告)号: US10371657B2公开(公告)日: 2019-08-06
- 发明人: Jordi Veirman , Sébastien Dubois
- 申请人: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Paris
- 代理机构: Oliff PLC
- 优先权: FR1301875 20130802
- 国际申请: PCT/FR2014/000179 WO 20140801
- 国际公布: WO2015/015065 WO 20150205
- 主分类号: G01R27/08
- IPC分类号: G01R27/08 ; G01N27/04 ; G01N21/95 ; H01L21/66 ; G01N21/3504 ; G01R31/26 ; G01N33/00
摘要:
A method for determining the original position of a wafer in an ingot made from semiconductor material comprises the following steps: measuring the interstitial oxygen concentration in an area of the wafer; measuring the concentration of thermal donors formed in said area of the wafer during a previous solidification of the ingot; determining the effective time of a thermal donor formation anneal undergone by the wafer when solidification of the ingot took place, from the thermal donor concentration and the interstitial oxygen concentration; and determining the original position of the wafer in the ingot from the effective time.
公开/授权文献
- US20160187278A1 METHOD FOR LOCATING A WAFER IN THE INGOT OF SAME 公开/授权日:2016-06-30
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