Invention Grant
- Patent Title: Target for ultraviolet light generation, and method for manufacturing same
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Application No.: US15580335Application Date: 2016-06-06
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Publication No.: US10381215B2Publication Date: 2019-08-13
- Inventor: Kohei Ikeda , Norio Ichikawa , Hiroyuki Taketomi
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2015-118186 20150611
- International Application: PCT/JP2016/066790 WO 20160606
- International Announcement: WO2016/199729 WO 20161215
- Main IPC: H01J63/02
- IPC: H01J63/02 ; H01J9/22 ; H01J63/06 ; H01J9/233

Abstract:
A target for ultraviolet light generation 20A includes a sapphire substrate 21 that transmits ultraviolet light UV, an interlayer 22 that is in contact with the sapphire substrate 21, includes oxygen atoms and aluminum atoms in a composition, and transmits ultraviolet light UV, and a luminous layer 23 that is provided on the interlayer 22, includes oxide crystals containing rare earth elements to which an activator agent is added, and receives electron beams EB so as to generate ultraviolet light UV.
Public/Granted literature
- US20180182608A1 TARGET FOR ULTRAVIOLET LIGHT GENERATION, AND METHOD FOR MANUFACTURING SAME Public/Granted day:2018-06-28
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