Invention Grant
- Patent Title: Method for detecting the center of substrate, method for transporting a substrate, transporting unit and apparatus for treating a substrate including the unit
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Application No.: US15274321Application Date: 2016-09-23
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Publication No.: US10388550B2Publication Date: 2019-08-20
- Inventor: Duk Sik Kim , Hyun Jun Kim
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-Do
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Carter, Deluca & Farrell LLP
- Priority: KR10-2015-0136079 20150925
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L23/544 ; H01L21/677 ; H01L21/68 ; H01L21/687

Abstract:
A method for detecting a center of substrate, for transporting a substrate, a substrate transporting unit, and a substrate treating apparatus are provided. The substrate center detecting method includes detecting four edge positions of the substrate, judging whether a notch exists among the four edge positions or not, moving the substrate when there is a notch among the four edge positions, and calculating a center of the substrate, wherein the calculating includes re-detecting four edge positions of the substrate, calculating a first midpoint of the substrate using three edge positions out of the four edge positions of the substrate detected in the detecting, calculating a second midpoint of the substrate using three edge positions out of the four edge positions of the substrate detected in the re-detecting, and determining a real midpoint of the substrate based on moving status of the first and second midpoints of the substrate.
Public/Granted literature
Information query
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