公开(公告)号：US10388550B2

公开(公告)日：2019-08-20

申请号：US15274321

申请日：2016-09-23

Applicant: SEMES CO., LTD.

Inventor： Duk Sik Kim ,  Hyun Jun Kim

IPC: H01L21/67 ,  H01L23/544 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

Abstract: A method for detecting a center of substrate, for transporting a substrate, a substrate transporting unit, and a substrate treating apparatus are provided. The substrate center detecting method includes detecting four edge positions of the substrate, judging whether a notch exists among the four edge positions or not, moving the substrate when there is a notch among the four edge positions, and calculating a center of the substrate, wherein the calculating includes re-detecting four edge positions of the substrate, calculating a first midpoint of the substrate using three edge positions out of the four edge positions of the substrate detected in the detecting, calculating a second midpoint of the substrate using three edge positions out of the four edge positions of the substrate detected in the re-detecting, and determining a real midpoint of the substrate based on moving status of the first and second midpoints of the substrate.

公开(公告)号：US11380565B2

公开(公告)日：2022-07-05

申请号：US16430631

申请日：2019-06-04

Applicant: SEMES CO., LTD.

Inventor： Duk Sik Kim ,  Hyun Jun Kim

IPC: H01L21/67 ,  H01L21/677 ,  B65G47/90 ,  H01L21/687 ,  H01L21/68 ,  B25J9/16 ,  G05B19/401 ,  G05B19/402

Abstract: A substrate misalignment compensation method includes obtaining first coordinates for an amount of movement of a substrate transfer apparatus and second coordinates measured by a plurality of sensors installed on the substrate transfer apparatus while moving the substrate transfer apparatus in one direction, calculating a calibration value of the substrate transfer apparatus by using an equation of a circle for the first coordinates and an equation of a line for the second coordinates, and calculating the center of a circle for a substrate based on the calibration value of the substrate transfer apparatus and compensating for misalignment of the substrate by using the center of the circle.