Invention Grant
- Patent Title: Magnetoresistive device and method of manufacturing same
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Application No.: US16053072Application Date: 2018-08-02
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Publication No.: US10396279B2Publication Date: 2019-08-27
- Inventor: Sarin A. Deshpande , Sanjeev Aggarwal , Kerry Joseph Nagel
- Applicant: Everspin Technologies, Inc.
- Applicant Address: US AZ Chandler
- Assignee: EVERSPIN TECHNOLOGIES, INC.
- Current Assignee: EVERSPIN TECHNOLOGIES, INC.
- Current Assignee Address: US AZ Chandler
- Agency: Bookoff Andrews, PLLC
- Main IPC: H01L43/12
- IPC: H01L43/12 ; G11B5/84 ; G11C11/16 ; H01L27/22 ; H01L43/02 ; H01L43/08

Abstract:
A magnetoresistive-based device and method of manufacturing a magnetoresistive-based device using one or more hard masks. The process of manufacture, in one embodiment, includes patterning a mask, after patterning the mask, etching (a) through a first layer of electrically conductive material to form an electrically conductive electrode and (b) through a third layer of ferromagnetic material to provide sidewalls of the second synthetic antiferromagnetic structure. The process further includes providing insulating material on or over the sidewalls of the second synthetic antiferromagnetic structure and, thereafter, etching through (a) a second tunnel barrier layer to provide sidewalls thereof, (b) a second layer of ferromagnetic material to provide sidewalls thereof, (c) a first tunnel barrier layer to provide sidewalls thereof, and (d) a first layer of ferromagnetic material to provide sidewalls of the first synthetic antiferromagnetic structure.
Public/Granted literature
- US20180342670A1 MAGNETORESISTIVE DEVICE AND METHOD OF MANUFACTURING SAME Public/Granted day:2018-11-29
Information query
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